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High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics
High Q micro-ring resonators polycrystalline aluminum nitride films visible photonics Optics
2012/5/29
We demonstrate wideband integrated photonic circuits in sputter-deposited aluminum nitride (AlN) thin films. At both near-infrared and visible wavelengths, we achieve low propagation loss in integrate...