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Quantitative Techniques for Measuring Cleanroom Wipers with Respect to Airborne Molecular Contamination
Cleanroom Wiper Airborne molecular contamination Particle Ion Nonvolatile residue
2016/3/28
Cleanroom wipers are generally of three classifications, namely, synthetic, natural fibers and blends of fibers. Ultra-fine
split type fiber is mostly selected as the wiper material since cleanrooms ...
Case Study of Micro-Contamination Control
Airborne molecular contamination (AMC) Cleanroom air quality Micro-contamination
2016/3/30
Airborne contaminants (gases and particles) pose serious threats to hi-tech industries with the
critical dimension of a micro-electronics chip quickly shrinking to nano-scale and the glass
substrate...