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Analysis of Relationship between Inorganic Gases and Fine Particles in Cleanroom Environment
Diffusion denuder system (DDS) AMCs (Airborne Molecular Contaminants) Micro-contamination Cleanroom
2016/3/29
The concentrations and characteristics of major components in inorganic gases and fine particles were measured at the
photo and etch cleanroom areas in a Taiwan semiconductor factory. The results sho...
Particle Deposition on a 300 mm Wafer Moving in the Opposite Direction of the Airflow in a Uni-directional Cleanroom
Particle deposition velocity Dynamic Simulation Computational Fluid Dynamics
2016/3/29
An investigation of the particle deposition velocity (vd) onto an upward moving 300 mm (dw) wafer in a cleanroom with
a 0.3 m/s downward velocity (vo) was performed by the dynamic mesh model of FLUEN...