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Defect Density and Electrical Properties of Vacuum Evaporated Copper Films From Annealing Studies of Electrical Resistance
Defect Density Electrical Properties Vacuum Evaporated Copper Films Electrical Resistance
2010/12/28
Copper films (210 – 1650 Å) were deposited onto glass microslides by vacuum evaporation. The films were subjected to heat treatment at a constant rate and the variation of electrical resistance ...